US Customs Ruling (CROSS)
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Ruling Number :
Issuing Country : UNITED STATES
Date Of Issue : 2010-01-06T00:00:00
subassembly of a step and repeat semiconductor manufacturing machine
a subassembly of a step and repeat semiconductor manufacturing machine consisting of a beam matching unit (bmu), an excimer laser, and fluorine traps. the bmu includes motors, optics, internal housing units, camera coupled device (ccd), neutral density (nd) filters, interlocks, and an external housing. the excimer laser consists of a laser exciter unit, a resonator unit, an optical system, a laser chamber, monitor module, automatic and manual shutters, a gas supply module, a vacuum pump module, various controllers, and fluorine traps. the complete semiconductor manufacturing machine will not function without the bmu/laser subassembly
Description : Subassembly of a Step and Repeat Semiconductor Manufacturing Machine
Please importantly note that only the relevant portion of the related US Ruling (Cross) is displayed above. You may refer to the said customs ruling for the entire ruling explanation.
Source : US Customs Ruling (CROSS)
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